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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

(南大沢:本館). -- Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB00063184>
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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

(南大沢:本館). -- Vol. 9, no. 1 (Jan./Feb. 1991)-. -- American Institute of Physics, 1991. <SB00063184>
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Details
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No. Library Location Location2 Call No Volume Available Years/Months Note
0001 Central Library Central：B1N_Foreign Periodical P/534/V13b 9-22 1991-2004
No. 0001
Library Central Library
Location Central：B1N_Foreign Periodical
Location2
Call No P/534/V13b
Volume 9-22
Available Years/Months 1991-2004
Note
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Bibliography Details

title and statement of responsibility area Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
edition area (南大沢:本館)
Volumes and Years of Serial Vol. 9, no. 1 (Jan./Feb. 1991)-
publication,distribution,etc.,area New York : American Institute of Physics , 1991-
physical description area v. : ill. ; 29 cm
variant titles 表紙タイトル:Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena
variant titles 背表紙タイトル:JVSTB, Nanotechnology & microelectronics
NCID AA10804928
text language code English
frequency of publication code Bimonthly
ISSN 21662746
relation bibliography link 継続前誌 :Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society <SB00013050>
XISSN 0734211X
XISSN 10711023
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